Inventor
CHATTOPADHYAY KAUSHIK
US13 patents
⚠️ This page may combine multiple inventors who share the name “CHATTOPADHYAY KAUSHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS7727880B1Jun 1, 2010
Protective self-aligned buffer layers for damascene interconnects
NOVELLUS SYSTEMS INC332 citations99
US7576006B1Aug 18, 2009
Protective self-aligned buffer layers for damascene interconnects
NOVELLUS SYSTEMS INC55 citations98
US8021486B1Sep 20, 2011
Protective self-aligned buffer layers for damascene interconnects
NOVELLUS SYSTEMS INC14 citations92
US7727881B1Jun 1, 2010
Protective self-aligned buffer layers for damascene interconnects
NOVELLUS SYSTEMS INC17 citations92
US7704873B1Apr 27, 2010
Protective self-aligned buffer layers for damascene interconnects
NOVELLUS SYSTEMS INC14 citations92
LAM RES CORP
4 patentsUS9881788B2Jan 30, 2018
Back side deposition apparatus and applications
LAM RES CORP372 citations97
US9018103B2Apr 28, 2015
High aspect ratio etch with combination mask
LAM RES CORP5 citations73
US10242883B2Mar 26, 2019
High aspect ratio etch of oxide metal oxide metal stack
LAM RES CORP0 citations52
US9659783B2May 23, 2017
High aspect ratio etch with combination mask
LAM RES CORP1 citations52
CHATTOPADHYAY KAUSHIK
3 patentsUS8173537B1May 8, 2012
Methods for reducing UV and dielectric diffusion barrier interaction
CHATTOPADHYAY KAUSHIK31 citations90
US8430992B1Apr 30, 2013
Protective self-aligned buffer layers for damascene interconnects
CHATTOPADHYAY KAUSHIK9 citations83
US8317923B1Nov 27, 2012
Protective self-aligned buffer layers for damascene interconnects
CHATTOPADHYAY KAUSHIK8 citations83