Inventor
ARNZ MICHAEL
DE20 patents
⚠️ This page may combine multiple inventors who share the name “ARNZ MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ARNZ MICHAEL
8 patentsUS8457411B2Jun 4, 2013
Method and device for determining the position of an edge of a marker structure with subpixel accuracy in an image, having a plurality of pixels, of the marker structure
ARNZ MICHAEL4 citations61
US8218148B2Jul 10, 2012
Method and apparatus for measuring scattered light on an optical system
ARNZ MICHAEL2 citations61
US8260033B2Sep 4, 2012
Method and apparatus for determining the relative overlay shift of stacked layers
ARNZ MICHAEL2 citations60
US9229209B2Jan 5, 2016
Autofocus device and autofocusing method for an imaging device
ARNZ MICHAEL2 citations54
US9303975B2Apr 5, 2016
Method for determining the registration of a structure on a photomask and apparatus to perform the method
ARNZ MICHAEL0 citations50
US8693805B2Apr 8, 2014
Determination of the relative position of two structures
ARNZ MICHAEL1 citations50
US9014505B2Apr 21, 2015
Method and device for determining the position of a first structure relative to a second structure or a part thereof
ARNZ MICHAEL0 citations40
US8731273B2May 20, 2014
Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section
ARNZ MICHAEL0 citations40
ZEISS CARL SMT GMBH
5 patentsUS10012911B2Jul 3, 2018
Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator
ZEISS CARL SMT GMBH1 citations52
US9377415B2Jun 28, 2016
Measuring device for measuring an illumination property
ZEISS CARL SMT GMBH0 citations52
US10113864B2Oct 30, 2018
Method for determining the registration of a structure on a photomask and apparatus to perform the method
ZEISS CARL SMT GMBH0 citations51
US9786046B2Oct 10, 2017
Method and device for determining a lateral offset of a pattern on a substrate relative to a desired position
ZEISS CARL SMT GMBH1 citations51
US9797805B2Oct 24, 2017
Test object for measuring the point spread function of an optical system
ZEISS CARL SMT GMBH0 citations50
ZEISS CARL SMT AG
3 patentsUS6816247B1Nov 9, 2004
Moiré method and a system for measuring the distortion of an optical imaging system
ZEISS CARL SMT AG36 citations87
US7408631B2Aug 5, 2008
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask
ZEISS CARL SMT AG9 citations82
US7755748B2Jul 13, 2010
Device and method for range-resolved determination of scattered light, and an illumination mask
ZEISS CARL SMT AG4 citations61