Inventor
ONO DAISUKE
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ONO DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIBAURA MECHATRONICS CORP
6 patentsUS11505866B2Nov 22, 2022
Film formation apparatus and film formation method
SHIBAURA MECHATRONICS CORP0 citations51
US11211233B2Dec 28, 2021
Film formation apparatus
SHIBAURA MECHATRONICS CORP0 citations51
US11004665B2May 11, 2021
Plasma processing apparatus
SHIBAURA MECHATRONICS CORP0 citations51
US10896841B2Jan 19, 2021
Film formation apparatus
SHIBAURA MECHATRONICS CORP0 citations51
US10260145B2Apr 16, 2019
Film formation apparatus and film formation method
SHIBAURA MECHATRONICS CORP0 citations51
US10903059B2Jan 26, 2021
Film formation apparatus
SHIBAURA MECHATRONICS CORP0 citations50