Inventor
ZINK PETER
DE12 patents
⚠️ This page may combine multiple inventors who share the name “ZINK PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZINK PETER
3 patentsUS8945310B2Feb 3, 2015
Method and device for cleaning at least one optical component
ZINK PETER7 citations79
US9110390B2Aug 18, 2015
Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity
ZINK PETER0 citations48
US8101930B2Jan 24, 2012
Method of increasing the operation lifetime of a collector optics arranged in an irradiation device
ZINK PETER0 citations37
KONINKL PHILIPS ELECTRONICS NV
3 patentsUS7460646B2Dec 2, 2008
Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma
KONINKL PHILIPS ELECTRONICS NV2 citations61
US7809112B2Oct 5, 2010
Method and device for generating EUV radiation and/or soft X-ray radiation
KONINKL PHILIPS ELECTRONICS NV2 citations60
US7732789B2Jun 8, 2010
Optical system having a cleaning arrangement
KONINKL PHILIPS ELECTRONICS NV1 citations43