Inventor

APETZ ROLF THEO ANTON

DE7 patents

⚠️ This page may combine multiple inventors who share the name “APETZ ROLF THEO ANTON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KONINKL PHILIPS ELECTRONICS NV

3 patents

US7396792B2Jul 8, 2008

Transparent polycrystalline aluminium oxide

KONINKL PHILIPS ELECTRONICS NV14 citations79

US7809112B2Oct 5, 2010

Method and device for generating EUV radiation and/or soft X-ray radiation

KONINKL PHILIPS ELECTRONICS NV2 citations60

US7799136B2Sep 21, 2010

Method of cleaning at least one surface of an optical device disposed in a vacuum chamber

KONINKL PHILIPS ELECTRONICS NV0 citations48

KONINKLIJKE PHILIPS NV

1 patent

US9897724B2Feb 20, 2018

Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity

KONINKLIJKE PHILIPS NV0 citations50

METZMACHER CHRISTOF

1 patent

US8749178B2Jun 10, 2014

Electrode system, in particular for gas discharge light sources

METZMACHER CHRISTOF0 citations49

ZINK PETER

1 patent

US9110390B2Aug 18, 2015

Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity

ZINK PETER0 citations48

USHIO ELECTRIC INC

1 patent

US9599812B2Mar 21, 2017

Foil trap and light source device using such foil trap

USHIO ELECTRIC INC1 citations47