Inventor
BYKANOV ALEXANDER
US14 patents
⚠️ This page may combine multiple inventors who share the name “BYKANOV ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
10 patentsUS9544984B2Jan 10, 2017
System and method for generation of extreme ultraviolet light
KLA TENCOR CORP10 citations82
US10034362B2Jul 24, 2018
Plasma-based light source
KLA TENCOR CORP11 citations79
US10959318B2Mar 23, 2021
X-ray metrology system with broadband laser produced plasma illuminator
KLA TENCOR CORP6 citations72
US9989758B2Jun 5, 2018
Debris protection system for reflective optic utilizing gas flow
KLA TENCOR CORP6 citations72
US9420678B2Aug 16, 2016
System and method for producing an exclusionary buffer gas flow in an EUV light source
KLA TENCOR CORP5 citations72
US11073487B2Jul 27, 2021
Methods and systems for characterization of an x-ray beam with high spatial resolution
KLA TENCOR CORP3 citations71
US10816486B2Oct 27, 2020
Multilayer targets for calibration and alignment of X-ray based measurement systems
KLA TENCOR CORP2 citations71
US10359377B2Jul 23, 2019
Beam shaping slit for small spot size transmission small angle X-ray scatterometry
KLA TENCOR CORP5 citations70
US9295147B2Mar 22, 2016
EUV light source using cryogenic droplet targets in mask inspection
KLA TENCOR CORP5 citations67
US10880979B2Dec 29, 2020
Droplet generation for a laser produced plasma light source
KLA TENCOR CORP1 citations61
KLA CORP
3 patentsUS12133318B2Oct 29, 2024
Rotating target for extreme ultraviolet source with liquid metal
KLA CORP1 citations62
US11343899B2May 24, 2022
Droplet generation for a laser produced plasma light source
KLA CORP0 citations61
US11635700B2Apr 25, 2023
Method and apparatus for EUV mask inspection
KLA CORP0 citations46