Inventor

MASHIMO KIMIKO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “MASHIMO KIMIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

2 patents

US10083830B2Sep 25, 2018

Substrate cleaning method for removing oxide film

CANON ANELVA CORP67 citations96

US9593412B2Mar 14, 2017

Deposition apparatus and electronic device manufacturing method

CANON ANELVA CORP0 citations49

YAMAGUCHI NOBUO

2 patents

US8663437B2Mar 4, 2014

Deposition apparatus and electronic device manufacturing method

YAMAGUCHI NOBUO7 citations80

US9322092B2Apr 26, 2016

Sputtering apparatus and method of manufacturing electronic device

YAMAGUCHI NOBUO5 citations69

NAKATANI ISAO

1 patent

US8524094B2Sep 3, 2013

Masking material for dry etching

NAKATANI ISAO0 citations35