Inventor

JEON KANGMIN

KR6 patents

⚠️ This page may combine multiple inventors who share the name “JEON KANGMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

5 patents

US10934621B2Mar 2, 2021

Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD14 citations84

US11384433B2Jul 12, 2022

Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations61

US9355857B2May 31, 2016

Substrate manufacturing method and substrate manufacturing apparatus

SAMSUNG ELECTRONICS CO LTD1 citations50

US12494352B2Dec 9, 2025

Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations45

US11251022B2Feb 15, 2022

Gas supply assembly and substrate processing apparatus including the same

SAMSUNG ELECTRONICS CO LTD0 citations45

KIM TAE-HWA

1 patent

US9847266B2Dec 19, 2017

Method of fabricating semiconductor device

KIM TAE-HWA1 citations42