Inventor
KUBO AKIHIRO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KUBO AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10074542B2Sep 11, 2018
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD6 citations82
US11554389B2Jan 17, 2023
Substrate cleaning apparatus and substrate cleaning method
TOKYO ELECTRON LTD2 citations72
US11059145B2Jul 13, 2021
Dressing apparatus and dressing method for substrate rear surface polishing member
TOKYO ELECTRON LTD2 citations69
US10840079B2Nov 17, 2020
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD2 citations68
US11532487B2Dec 20, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US7947926B2May 24, 2011
Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the method
TOKYO ELECTRON LTD2 citations59
US12533715B2Jan 27, 2026
Substrate cleaning apparatus and substrate cleaning method
TOKYO ELECTRON LTD0 citations51
US10328546B2Jun 25, 2019
Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD0 citations50
US9669510B2Jun 6, 2017
Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD1 citations50
US12491600B2Dec 9, 2025
Substrate warpage correction method, computer storage medium, and substrate warpage correction apparatus
TOKYO ELECTRON LTD0 citations47
US9570327B2Feb 14, 2017
Substrate liquid treatment apparatus and substrate liquid treatment method
TOKYO ELECTRON LTD0 citations37