Inventor
NARAHARA KAZUHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NARAHARA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
5 patentsUS11984346B2May 14, 2024
Susceptor, epitaxial growth apparatus, method of producing epitaxial silicon wafer, and epitaxial silicon wafer
SUMCO CORP0 citations60
US11501996B2Nov 15, 2022
Susceptor, epitaxial growth apparatus, method of producing epitaxial silicon wafer, and epitaxial silicon wafer
SUMCO CORP1 citations60
US9631297B2Apr 25, 2017
Method of producing epitaxial silicon wafer and epitaxial silicon wafer
SUMCO CORP0 citations49
US11846039B2Dec 19, 2023
Vapor deposition device and method for manufacturing epitaxial silicon wafer
SUMCO CORP0 citations47
US12129543B2Oct 29, 2024
Epitaxial growth apparatus and method of producing epitaxial wafer
SUMCO CORP0 citations45
SUMCO TECHXIV CORP
4 patentsUS8372196B2Feb 12, 2013
Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxial wafer
SUMCO TECHXIV CORP8 citations83
US8021484B2Sep 20, 2011
Method of manufacturing epitaxial silicon wafer and apparatus therefor
SUMCO TECHXIV CORP9 citations80
US7537658B2May 26, 2009
Method for producing epitaxial silicon wafer
SUMCO TECHXIV CORP8 citations77
US7993452B2Aug 9, 2011
Method of manufacturing epitaxial silicon wafer
SUMCO TECHXIV CORP3 citations59