Inventor
KWON THOMAS JONGWAN
US19 patents
⚠️ This page may combine multiple inventors who share the name “KWON THOMAS JONGWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS10622214B2Apr 14, 2020
Tungsten defluorination by high pressure treatment
APPLIED MATERIALS INC15 citations94
US9991118B2Jun 5, 2018
Hybrid carbon hardmask for lateral hardmask recess reduction
APPLIED MATERIALS INC4 citations73
US10157787B2Dec 18, 2018
Method and apparatus for depositing cobalt in a feature
APPLIED MATERIALS INC4 citations71
US10246772B2Apr 2, 2019
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
APPLIED MATERIALS INC5 citations70
US12593627B2Mar 31, 2026
Tungsten defluorination by high pressure treatment
APPLIED MATERIALS INC0 citations62
US11705337B2Jul 18, 2023
Tungsten defluorination by high pressure treatment
APPLIED MATERIALS INC0 citations62
US10410864B2Sep 10, 2019
Hybrid carbon hardmask for lateral hardmask recess reduction
APPLIED MATERIALS INC1 citations62
US11365476B2Jun 21, 2022
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
APPLIED MATERIALS INC1 citations59
US10714388B2Jul 14, 2020
Method and apparatus for depositing cobalt in a feature
APPLIED MATERIALS INC0 citations51
US10825681B2Nov 3, 2020
3D CTF integration using hybrid charge trap layer of sin and self aligned SiGe nanodot
APPLIED MATERIALS INC0 citations43
US10446392B2Oct 15, 2019
Self-aligned nanodots for 3D NAND flash memory
APPLIED MATERIALS INC0 citations37