Inventor
SCHWARZ MIKE
DE10 patents
Patents
10 patentsUS11486782B2Nov 1, 2022
Micromechanical device and method for manufacturing a micromechanical device
BOSCH GMBH ROBERT4 citations71
US11060937B2Jul 13, 2021
Micromechanical pressure sensor
BOSCH GMBH ROBERT2 citations69
US11326969B2May 10, 2022
Linearized micromechanical sensor
BOSCH GMBH ROBERT2 citations67
US12448280B2Oct 21, 2025
Bond structures on MEMS element and ASIC element
BOSCH GMBH ROBERT0 citations60
US11608264B2Mar 21, 2023
Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate
BOSCH GMBH ROBERT0 citations50
US12145840B2Nov 19, 2024
MEMS sensor as well as method for operating a mems sensor
BOSCH GMBH ROBERT0 citations49
US10775253B2Sep 15, 2020
Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component
BOSCH GMBH ROBERT0 citations48
US10914675B2Feb 9, 2021
Sensor device for measuring a fluid concentration, and use of the sensor device
BOSCH GMBH ROBERT0 citations45
US11952263B2Apr 9, 2024
Micromechanical sensor device and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations37
US10442681B2Oct 15, 2019
Micromechanical system including a sensitive element and associated manufacturing method
BOSCH GMBH ROBERT0 citations37