Inventor
UNDERWOOD BRIAN SAXTON
US5 patents
Patents
5 patentsUS10460936B2Oct 29, 2019
Photo-assisted deposition of flowable films
APPLIED MATERIALS INC3 citations72
US8986557B2Mar 24, 2015
HDD patterning using flowable CVD film
APPLIED MATERIALS INC4 citations72
US9947576B2Apr 17, 2018
UV-assisted material injection into porous films
APPLIED MATERIALS INC4 citations71
US9343293B2May 17, 2016
Flowable silicon—carbon—oxygen layers for semiconductor processing
APPLIED MATERIALS INC5 citations71
US10790139B2Sep 29, 2020
Deposition of silicon and oxygen-containing films without an oxidizer
APPLIED MATERIALS INC0 citations39