Inventor
YEO DONGYUN
KR5 patents
Patents
5 patentsUS10522374B2Dec 31, 2019
Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD7 citations82
US10854485B2Dec 1, 2020
Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US11984344B2May 14, 2024
Lift apparatus and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations44
US11404252B2Aug 2, 2022
Electrostatic chuck and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations43
US12362216B2Jul 15, 2025
Plasma processing apparatus and semiconductor fabrication method using the same
SAMSUNG ELECTRONICS CO LTD0 citations42