Inventor
JEON YUN-KWANG
KR16 patents
Patents
16 patentsUS10522374B2Dec 31, 2019
Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD7 citations82
US10395900B2Aug 27, 2019
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD7 citations82
US7285788B2Oct 23, 2007
Ion beam extractor
SAMSUNG ELECTRONICS CO LTD10 citations82
US10103043B2Oct 16, 2018
Apparatus for transferring substrate and apparatus for processing substrate including the same
SAMSUNG ELECTRONICS CO LTD6 citations78
US10224228B2Mar 5, 2019
Electrostatic chucks and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD4 citations72
US10854485B2Dec 1, 2020
Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US10971333B2Apr 6, 2021
Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD2 citations70
US10229818B2Mar 12, 2019
Apparatus for monitoring process chamber
SAMSUNG ELECTRONICS CO LTD2 citations70
US10481005B2Nov 19, 2019
Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same
SAMSUNG ELECTRONICS CO LTD3 citations68
US10896838B2Jan 19, 2021
Electrostatic chucks and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations62
US7282702B2Oct 16, 2007
Ion neutralizer
SAMSUNG ELECTRONICS CO LTD4 citations62
US10903053B2Jan 26, 2021
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations61
US10971343B2Apr 6, 2021
Apparatus for monitoring process chamber
SAMSUNG ELECTRONICS CO LTD0 citations60
US12327709B2Jun 10, 2025
Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US10566221B2Feb 18, 2020
Apparatus for transferring substrate and apparatus for processing substrate including the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US10861724B2Dec 8, 2020
Substrate inspection apparatus and substrate processing system including the same
SAMSUNG ELECTRONICS CO LTD0 citations45