Inventor
YEH YA-WEN
TW18 patents
Patents
18 patentsUS10861698B2Dec 8, 2020
Pattern fidelity enhancement
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11791161B2Oct 17, 2023
Pattern fidelity enhancement
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11289332B2Mar 29, 2022
Directional processing to remove a layer or a material formed over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11094556B2Aug 17, 2021
Method of manufacturing semiconductor devices using directional process
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10707081B2Jul 7, 2020
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10354874B2Jul 16, 2019
Directional processing to remove a layer or a material formed over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US12334342B2Jun 17, 2025
Pattern fidelity enhancement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12230507B2Feb 18, 2025
Method of manufacturing semiconductor devices using directional process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12153350B2Nov 26, 2024
Method of manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11955338B2Apr 9, 2024
Directional deposition for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11881401B2Jan 23, 2024
Method of forming metal features
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11862465B2Jan 2, 2024
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11796922B2Oct 24, 2023
Method of manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11651972B2May 16, 2023
Method of manufacturing semiconductor devices using directional process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11569090B2Jan 31, 2023
Directional deposition for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11239078B2Feb 1, 2022
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11075079B2Jul 27, 2021
Directional deposition for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043381B2Jun 22, 2021
Directional patterning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62