Inventor
CHANDRAN SHANKAR
US5 patents
Patents
5 patentsUS6218268B1Apr 17, 2001
Two-step borophosphosilicate glass deposition process and related devices and apparatus
APPLIED MATERIALS INC80 citations95
US6170492B1Jan 9, 2001
Cleaning process end point determination using throttle valve position
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US6596343B1Jul 22, 2003
Method and apparatus for processing semiconductor substrates with hydroxyl radicals
APPLIED MATERIALS INC13 citations84
US7638161B2Dec 29, 2009
Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumption
APPLIED MATERIALS INC7 citations68
US6514882B2Feb 4, 2003
Aggregate dielectric layer to reduce nitride consumption
APPLIED MATERIALS INC7 citations64