Inventor
CAMPANA FRANCIMAR
US10 patents
Patents
10 patentsUS6537733B2Mar 25, 2003
Method of depositing low dielectric constant silicon carbide layers
APPLIED MATERIALS INC292 citations98
US6426015B1Jul 30, 2002
Method of reducing undesired etching of insulation due to elevated boron concentrations
APPLIED MATERIALS INC106 citations98
US6218268B1Apr 17, 2001
Two-step borophosphosilicate glass deposition process and related devices and apparatus
APPLIED MATERIALS INC80 citations95
US7200460B2Apr 3, 2007
Method of depositing low dielectric constant silicon carbide layers
APPLIED MATERIALS INC17 citations92
US6261975B1Jul 17, 2001
Method for depositing and planarizing fluorinated BPSG films
APPLIED MATERIALS INC27 citations92
US6599574B1Jul 29, 2003
Method and apparatus for forming a dielectric film using helium as a carrier gas
APPLIED MATERIALS INC25 citations91
US6090206AJul 18, 2000
Throttle valve providing enhanced cleaning
APPLIED MATERIALS INC34 citations91
US6596343B1Jul 22, 2003
Method and apparatus for processing semiconductor substrates with hydroxyl radicals
APPLIED MATERIALS INC13 citations84
US6855484B2Feb 15, 2005
Method of depositing low dielectric constant silicon carbide layers
APPLIED MATERIALS INC10 citations73
US6153540ANov 28, 2000
Method of forming phosphosilicate glass having a high wet-etch rate
APPLIED MATERIALS INC3 citations60