Inventor
TRIMPL MARCEL
US5 patents
⚠️ This page may combine multiple inventors who share the name “TRIMPL MARCEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
3 patentsUS11699607B2Jul 11, 2023
Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons
KLA CORP1 citations60
US11610757B2Mar 21, 2023
Sensor module for scanning electron microscopy applications
KLA CORP0 citations47
US12484316B2Nov 25, 2025
CVD boron uniformity overcoming loading effects
KLA CORP0 citations43