Inventor

MATSUMOTO SHUNICHI

JP75 patents

⚠️ This page may combine multiple inventors who share the name “MATSUMOTO SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUMOTO SHUNICHI

HITACHI LTD

Optical apparatus for defect and particle size inspection

Method and system for processing a semi-conductor device

Foreign particle inspection apparatus and method with front and back illumination

Method of and apparatus for inspecting reticle for defects

Method of and apparatus for inspecting reticle for defects

Method of detecting defects on an object

Method and system for monitoring a semiconductor device manufacturing process

Method for producing a semiconductor device

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Overlay inspection apparatus for semiconductor substrate and method thereof

Method and its apparatus for measuring size and shape of fine patterns

Overlay inspection apparatus for semiconductor substrate and method thereof

HITACHI HIGH TECH CORP

Apparatus and method for testing defects

Apparatus and method for testing defects

Defect observation method and device therefor

Method and apparatus for reviewing defect

Defect detection method and defect detection device and defect observation device provided with same

Defect inspection apparatus and defect inspection method

Defect inspection device and defect inspection method

Defect inspection device

Lighting optical system and substrate inspecting device

Defect inspection apparatus and defect inspection method

Defect detection method and defect detection device and defect observation device provided with same

PI R & D CO LTD

Positive photosensitive poliymide composition

Negative photosensitive polyimide composition and method for forming image the same

Method for forming polyimide pattern using photosensitive polyimide and composition for use therein

Imide-benzoxazole polycondensate and process for producing the same

Composition for electrodeposition of polyimides and method for producing patterned polyimide membranes using the same

Composite film

MITSUBISHI GAS CHEMICAL CO

Process for continuous production of alkylbenzaldehydes

Process for the production of polyol ester and ester-containing lubricating oil

Process for formylating xylene mixture

Process for the production of esters

Process for manufacturing high-purity o-toluic acid

TANIGUCHI ATSUSHI

Defect inspecting apparatus and defect inspecting method

Defect inspection device and defect inspection method

Defect inspecting apparatus and defect inspecting method

NOMURA RES INST LTD

Operation verifying apparatus, operation verifying method and operation verifying system

Operation verifying apparatus, operation verifying method and operation verifying system

Operation verifying apparatus, operation verifying method and operation verifying system

HITACHI DISPLAYS LTD

Display device with waterproof sheet and water absorbing member

Display device with waterproof sheet and recessed portion or through hole formed in a surface of the frame member which faces the waterproof sheet

INOUE HISASHI

Heat treatment method and heat treatment apparatus wherein the substrate holder is composed of two holder constituting bodies that move relative to each other

TOKYO ELECTRON LTD

Heat treatment method wherein the substrate holder is composed of two holder constituting bodies that move relative to each other

MATSUMOTO SHUNICHI

Method and apparatus for inspecting defect

YASUDA MAMORU

Operation verifying apparatus, operation verifying method and operation verifying system

ISHIBE TAKAFUMI

Nerve stimulation apparatus and biomagnetic field measurement system

(unassigned)

Exposure mask with appended mask error data