Inventor
WEI SHAO-CHI
DE13 patents
⚠️ This page may combine multiple inventors who share the name “WEI SHAO-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS11209736B2Dec 28, 2021
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US10508953B2Dec 17, 2019
Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US12463029B2Nov 4, 2025
Cleaning method, semiconductor manufacturing method and a system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11600484B2Mar 7, 2023
Cleaning method, semiconductor manufacturing method and a system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12282260B2Apr 22, 2025
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11307492B2Apr 19, 2022
Method for forming photomask and photolithography method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10845699B2Nov 24, 2020
Method for forming photomask and photolithography method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US10101651B1Oct 16, 2018
Photo mask assembly and optical apparatus including the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10816891B2Oct 27, 2020
Photomask and fabrication method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10459332B2Oct 29, 2019
Mask blank and fabrication method thereof, and method of fabricating photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48