Inventor
Hsiung Te-Chih
TW28 patents
Patents
28 patentsUS11581218B2Feb 14, 2023
Etch profile control of gate contact opening
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations86
US9837539B1Dec 5, 2017
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US11996321B2May 28, 2024
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations74
US12057345B2Aug 6, 2024
Etch profile control of gate contact opening
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11664272B2May 30, 2023
Etch profile control of gate contact opening
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11961893B2Apr 16, 2024
Contacts for semiconductor devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10153373B2Dec 11, 2018
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12550362B2Feb 10, 2026
Transistor device with tapered gate contact profile
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12538777B2Jan 27, 2026
Fin field effect transistor (FinFET) having hourglass-shaped via structure on source/drain and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12446296B2Oct 14, 2025
Etch profile control of via opening
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12349395B2Jul 1, 2025
Inter block for recessed contacts and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12119386B2Oct 15, 2024
Conductive capping for work function layer and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12107003B2Oct 1, 2024
Etch profile control of gate contact opening
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12107007B2Oct 1, 2024
Recessed contacts at line end and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080597B2Sep 3, 2024
Semiconductor devices and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11967526B2Apr 23, 2024
Integrated circuit structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11967622B2Apr 23, 2024
Inter block for recessed contacts and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11942371B2Mar 26, 2024
Etch profile control of via opening
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11749732B2Sep 5, 2023
Etch profile control of via opening
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11728212B2Aug 15, 2023
Integrated circuit structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11705491B2Jul 18, 2023
Etch profile control of gate contact opening
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11424364B2Aug 23, 2022
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11211496B2Dec 28, 2021
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12183633B2Dec 31, 2024
Dielectric cap structure in semiconductor devices and methods of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11810919B2Nov 7, 2023
Semiconductor device structure with conductive via structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12324221B2Jun 3, 2025
Semiconductor device and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10727346B2Jul 28, 2020
FinFET device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12087832B2Sep 10, 2024
Semiconductor device interconnects and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47