Inventor
BAILEY FRED D
US4 patents
Patents
4 patentsUS6921962B1Jul 26, 2005
Integrated circuit having a thin film resistor located within a multilevel dielectric between an upper and lower metal interconnect layer
TEXAS INSTRUMENTS INC30 citations91
US6645821B2Nov 11, 2003
Method of producing a thin film resistor in an integrated circuit
TEXAS INSTRUMENTS INC19 citations91
US6326256B1Dec 4, 2001
Method of producing a laser trimmable thin film resistor in an integrated circuit
TEXAS INSTRUMENTS INC43 citations91
US6737326B2May 18, 2004
Method of integrating a thin film resistor in a multi-level metal tungsten-plug interconnect
TEXAS INSTRUMENTS INC11 citations73