Inventor
Mason Eric Anders
US15 patents
Patents
15 patentsUS9989866B2Jun 5, 2018
Wafer-based light source parameter control
Cymer LLC18 citations91
US9835959B1Dec 5, 2017
Controlling for wafer stage vibration
Cymer LLC7 citations82
US10416471B2Sep 17, 2019
Spectral feature control apparatus
Cymer LLC2 citations71
US9997888B2Jun 12, 2018
Control of a spectral feature of a pulsed light beam
Cymer LLC5 citations71
US12124053B2Oct 22, 2024
Spectral feature control apparatus
Cymer LLC0 citations61
US11561407B2Jan 24, 2023
Spectral feature control apparatus
Cymer LLC0 citations61
US12374853B2Jul 29, 2025
Control system for a plurality of deep ultraviolet optical oscillators
Cymer LLC0 citations59
US12586978B2Mar 24, 2026
Apparatus for and method of generating multiple laser beams
Cymer LLC0 citations57
US11784452B2Oct 10, 2023
Optical element for a deep ultraviolet light source
Cymer LLC0 citations52
US12166327B2Dec 10, 2024
Series of stacked confocal pulse stretchers for speckle reduction
Cymer LLC0 citations51
US10845610B2Nov 24, 2020
Spectral feature control apparatus
Cymer LLC0 citations50
US10268123B2Apr 23, 2019
Wafer-based light source parameter control
Cymer LLC0 citations49
US9709897B2Jul 18, 2017
Polarization control of pulsed light beam
Cymer LLC1 citations48
US12298670B2May 13, 2025
Apparatus for and methods of combining multiple laser beams
Cymer LLC0 citations44
US10585215B2Mar 10, 2020
Reducing optical damage on an optical element
Cymer LLC0 citations28