Inventor
MELCHIOR JOHN THEODORE
US4 patents
Patents
4 patentsUS11784452B2Oct 10, 2023
Optical element for a deep ultraviolet light source
Cymer LLC0 citations52
US11860036B2Jan 2, 2024
Determination of measurement error in an etalon
Cymer LLC0 citations45
US12298670B2May 13, 2025
Apparatus for and methods of combining multiple laser beams
Cymer LLC0 citations44
US12476432B2Nov 18, 2025
Directed gas purge to reduce dusting of excimer discharge chamber windows
Cymer LLC0 citations42