Inventor
NAGAI Asumi
JP7 patents
Patents
7 patentsUS11837488B2Dec 5, 2023
Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body
NGK INSULATORS LTD0 citations61
US11548829B2Jan 10, 2023
Dense composite material, method for producing the same, joined body, and member for semiconductor manufacturing device
NGK INSULATORS LTD0 citations60
US10631370B2Apr 21, 2020
Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft
NGK INSULATORS LTD1 citations60
US11845697B2Dec 19, 2023
Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body
NGK INSULATORS LTD0 citations59
US11926570B2Mar 12, 2024
Composite sintered body, semiconductor manufacturing apparatus member, and method of producing composite sintered body
NGK INSULATORS LTD0 citations57
US11830753B2Nov 28, 2023
Composite sintered body, semiconductor manufacturing apparatus member and method of producing composite sintered body
NGK INSULATORS LTD0 citations56
US12315757B2May 27, 2025
Stacked structure and semiconductor manufacturing apparatus member
NGK INSULATORS LTD0 citations49