Inventor
AHRENS MARCO
DE2 patents
Patents
2 patentsUS6664010B2Dec 16, 2003
OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration
INFINEON TECHNOLOGIES AG16 citations80
US7354683B2Apr 8, 2008
Lithography mask for imaging of convex structures
INFINEON TECHNOLOGIES AG0 citations48