Inventor
KNOBLOCH JUERGEN
DE8 patents
⚠️ This page may combine multiple inventors who share the name “KNOBLOCH JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS6664010B2Dec 16, 2003
OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration
INFINEON TECHNOLOGIES AG16 citations80
US6838216B2Jan 4, 2005
Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus
INFINEON TECHNOLOGIES AG9 citations70
US6794095B2Sep 21, 2004
Method of fabricating a microstructure and photolithography trimming mask
INFINEON TECHNOLOGIES AG2 citations60
US6569772B2May 27, 2003
Method for producing an alternating phase mask
INFINEON TECHNOLOGIES AG1 citations51