Inventor
JUNG IN KI
KR8 patents
Patents
8 patentsUS12366799B2Jul 22, 2025
Apparatus for correcting photomask and method thereof
SEMES CO LTD0 citations61
US12591175B2Mar 31, 2026
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations49
US12517440B2Jan 6, 2026
Irradiating module, and substrate treating apparatus including the same
SEMES CO LTD0 citations49
US12463086B2Nov 4, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations48
US12431383B2Sep 30, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations48
US12504690B2Dec 23, 2025
Apparatus for treating substrate and method for treating a substrate
SEMES CO LTD0 citations47
US12508633B2Dec 30, 2025
Moving assembly for recovery guard and substrate processing apparatus
SEMES CO LTD0 citations46
US12400903B2Aug 26, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations45