P

Inventor

KONDO HIROYUKI

JP116 patents
⚠️ This page may combine multiple inventors who share the name “KONDO HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

13 patents
US6504903B1Jan 7, 2003

Laser-excited plasma light source, exposure apparatus and its making method, and device manufacturing method

NIKON CORP75 citations97
US6285743B1Sep 4, 2001

Method and apparatus for soft X-ray generation

NIKON CORP108 citations97
US6545272B1Apr 8, 2003

Apparatus and methods for monitoring contamination of an optical component in an optical system

NIKON CORP65 citations96
US6522717B1Feb 18, 2003

Reflective-type soft x-ray microscope

NIKON CORP74 citations96
US6507641B1Jan 14, 2003

X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same

NIKON CORP78 citations96
US6842500B1Jan 11, 2005

Exposure apparatus and exposure method using same

NIKON CORP30 citations93
US6690764B2Feb 10, 2004

X-ray sources that maintain production of rotationally symmetrical x-ray flux during use

NIKON CORP22 citations93
US6385290B1May 7, 2002

X-ray apparatus

NIKON CORP37 citations92
US6339634B1Jan 15, 2002

Soft x-ray light source device

NIKON CORP47 citations92
US6069937AMay 30, 2000

Illumination apparatus

NIKON CORP20 citations92
US5464977ANov 7, 1995

Scanning optical detection apparatus and method, and photoelectric conversion medium applied thereto

NIKON CORP32 citations89
US6504900B2Jan 7, 2003

Optical sample X-ray testing apparatus and method for testing optical sample with X-rays

NIKON CORP16 citations84
US6909774B2Jun 21, 2005

Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems

NIKON CORP13 citations83

YAZAKI CORP

12 patents

MITSUBISHI ELECTRIC CORP

6 patents

NITTO DENKO CORP

2 patents

NIPPON STEEL CORP

2 patents

HITACHI LTD

2 patents

AISIN SEIKI

2 patents

NIKON TECHNOLOGIES INC

1 patent

DENSO CORP

1 patent

TOSHIBA CERAMICS CO

1 patent

KAO CORP

1 patent

PANASONIC CORP

1 patent

TOYOTA CHUO KENKYUSHO KK

1 patent

SUMITOMO RIKO CO LTD

1 patent

NAT INST OF ADV IND & TECHNOL

1 patent

OTANI SUGAKO

1 patent

SHINKO ELECTRIC CO LTD

1 patent

KOITO MFG CO LTD

1 patent

Showing the top 50 of 116 patents by PatentIndex Score.