Inventor
STRASBAUGH ALAN
US8 patents
⚠️ This page may combine multiple inventors who share the name “STRASBAUGH ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
STRASBAUGH
6 patentsUS7008309B2Mar 7, 2006
Back pressure control system for CMP and wafer polishing
STRASBAUGH15 citations91
US6696005B2Feb 24, 2004
Method for making a polishing pad with built-in optical sensor
STRASBAUGH15 citations82
US6638389B2Oct 28, 2003
Method for applying an insert or tape to chucks or wafer carriers used for grinding, polishing, or planarizing wafers
STRASBAUGH13 citations82
US7059942B2Jun 13, 2006
Method of backgrinding wafers while leaving backgrinding tape on a chuck
STRASBAUGH8 citations72
US6866564B2Mar 15, 2005
Method of backgrinding wafers while leaving backgrinding tape on a chuck
STRASBAUGH6 citations72
US7467990B2Dec 23, 2008
Back pressure control system for CMP and wafer polishing
STRASBAUGH2 citations61