Inventor

YASUZATO TADAO

JP23 patents

⚠️ This page may combine multiple inventors who share the name “YASUZATO TADAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YASUZATO TADAO

NEC CORP

Photomask and exposure method using a photomask

Optical proximity correction halftone type phase shift photomask

Photo mask and fabrication process therefor

Process of forming bump on electrode of semiconductor chip and apparatus used therefor

Photomask and method of exposure using same

Photomask used for projection exposure with phase shifted auxiliary pattern

Intensity distribution simulating method

Phase shift mask and its inspection method

Pattern forming method

Phase-shifting mask, exposure method and method for measuring amount of spherical aberration

Phase shifting photomask with two different transparent regions

Optical projection aligner equipped with rotatable fly-eye lens unit

Reduction exposure apparatus with improved resolution characteristic and raised light intensity

Optical aligner equipped with luminance sensor on movable stage

ELPIDA MEMORY INC

Pattern forming method and mask

Semiconductor device having plural patterns extending in the same direction

Exposure mask and pattern forming method therefor

Irradiation pattern data generation method, mask fabrication method, and plotting system

Mask data creation method

Mask data generation method and mask

Circuit pattern exposure method and mask

Exposure mask, pattern formation method, and exposure mask fabrication method

PS4 LUXCO SARL

Semiconductor device having plural patterns extending in the same direction