Inventor
SHABDE SUNIL N
US7 patents
Patents
7 patentsUS6147507ANov 14, 2000
System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer
ADVANCED MICRO DEVICES INC20 citations91
US6023327AFeb 8, 2000
System and method for detecting defects in an interlayer dielectric of a semiconductor device
ADVANCED MICRO DEVICES INC23 citations91
US6177802B1Jan 23, 2001
System and method for detecting defects in an interlayer dielectric of a semiconductor device using the hall-effect
ADVANCED MICRO DEVICES INC9 citations72
US6407558B2Jun 18, 2002
Method of determining the doping concentration across a surface of a semiconductor material
ADVANCED MICRO DEVICES INC4 citations61
US6320403B1Nov 20, 2001
Method of determining the doping concentration and defect profile across a surface of a processed semiconductor material
ADVANCED MICRO DEVICES INC4 citations61
US6208154B1Mar 27, 2001
Method of determining the doping concentration across a surface of a semiconductor material
ADVANCED MICRO DEVICES INC3 citations61
US6242924B1Jun 5, 2001
Method for electronically measuring size of internal void in electrically conductive lead
ADVANCED MICRO DEVICES INC2 citations57