Inventor
CHU KUO-TUNG
TW3 patents
Patents
3 patentsUS6045619AApr 4, 2000
Horizontal-type silicon-nitride furnace
UNITED MICROELECTRONICS CORP27 citations87
US6924219B1Aug 2, 2005
Method for forming polysilicon germanium layer
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US6403443B1Jun 11, 2002
Method for reducing surface humps of doped amorphous silicon layer
UNITED MICROELECTRONICS CORP0 citations41