Inventor
MINAMI AKIYUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI AKIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
9 patentsUS6601314B2Aug 5, 2003
Method of manufacturing alignment mark
OKI ELECTRIC IND CO LTD9 citations73
US6589385B2Jul 8, 2003
Resist mask for measuring the accuracy of overlaid layers
OKI ELECTRIC IND CO LTD6 citations73
US6440262B1Aug 27, 2002
Resist mask having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer
OKI ELECTRIC IND CO LTD10 citations73
US6368980B1Apr 9, 2002
Resist mark having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer and method for manufacturing semiconductor wafer having it
OKI ELECTRIC IND CO LTD7 citations73
US6140711AOct 31, 2000
Alignment marks of semiconductor substrate and manufacturing method thereof
OKI ELECTRIC IND CO LTD8 citations73
US6559063B2May 6, 2003
Method for manufacturing semiconductor wafer having resist mask with measurement marks for measuring the accuracy of overlay of a photomask
OKI ELECTRIC IND CO LTD2 citations62
US6757049B2Jun 29, 2004
Apparatus and method for exposure
OKI ELECTRIC IND CO LTD3 citations61
US7804127B2Sep 28, 2010
Semiconductor non-volatile memory having semiconductor non-volatile memory cell with electric charge accumulation layer, and method of producing the same
OKI ELECTRIC IND CO LTD2 citations59
US6562188B2May 13, 2003
Resist mask for measuring the accuracy of overlaid layers
OKI ELECTRIC IND CO LTD0 citations51