Inventor

HORIE TSUTOMU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “HORIE TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

3 patents

US7424145B2Sep 9, 2008

Device and method for inspecting photomasks and products fabricated using the same

FUJITSU LTD39 citations90

US6708323B2Mar 16, 2004

Method and apparatus for verifying mask pattern data according to given rules

FUJITSU LTD8 citations71

US6745484B2Jun 8, 2004

Reticle, and pattern positional accuracy measurement device and method

FUJITSU LTD6 citations60

FUJITSU MICROELECTRONICS LTD

2 patents

US7511817B2Mar 31, 2009

Reticle, reticle inspection method and reticle inspection apparatus

FUJITSU MICROELECTRONICS LTD2 citations59

US7664309B2Feb 16, 2010

Reticle inspecting apparatus and reticle inspecting method

FUJITSU MICROELECTRONICS LTD2 citations52

HORIE TSUTOMU

1 patent

US8223403B2Jul 17, 2012

Inspection apparatus, inspection method and manufacturing method of mask for exposure, and mask for exposure

HORIE TSUTOMU0 citations41