P

Inventor

YOSHINO TERUO

JP30 patents
⚠️ This page may combine multiple inventors who share the name “YOSHINO TERUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

13 patents
US11538661B1Dec 27, 2022

Substrate processing apparatus

KOKUSAI ELECTRIC CORP3 citations73
US11495435B2Nov 8, 2022

Substrate processing apparatus, non-transitory computer-readable recording medium, method of manufacturing semiconductor device, and a substrate processing method

KOKUSAI ELECTRIC CORP2 citations73
US11905596B2Feb 20, 2024

Method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP2 citations72
US12424409B2Sep 23, 2025

Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations62
US12387949B2Aug 12, 2025

Substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations62
US12195854B2Jan 14, 2025

Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US11967513B2Apr 23, 2024

Substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations62
US11923173B2Mar 5, 2024

Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations62
US11155922B2Oct 26, 2021

Method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US12320778B2Jun 3, 2025

Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations61
US11841343B2Dec 12, 2023

Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP1 citations61
US11145491B2Oct 12, 2021

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP1 citations61
US12106998B2Oct 1, 2024

Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations52

HITACHI INT ELECTRIC INC

6 patents

TOSHIBA KK

4 patents

TOSHIBA MITSUBISHI ELEC IND

3 patents

OZAKI YUKIO

1 patent

KOKUSAI ELECTRIC CO LTD

1 patent

HAMANO KATSUYOSHI

1 patent

NAT UNIV CORP YOKOHAMA NAT UNIV

1 patent