Inventor
SIRKIS MURRAY D
US11 patents
⚠️ This page may combine multiple inventors who share the name “SIRKIS MURRAY D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7164236B2Jan 16, 2007
Method and apparatus for improved plasma processing uniformity
TOKYO ELECTRON LTD66 citations97
US6917204B2Jul 12, 2005
Addition of power at selected harmonics of plasma processor drive frequency
TOKYO ELECTRON LTD65 citations95
US6861844B1Mar 1, 2005
Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma
TOKYO ELECTRON LTD22 citations92
US6741944B1May 25, 2004
Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma
TOKYO ELECTRON LTD28 citations92
US6646386B1Nov 11, 2003
Stabilized oscillator circuit for plasma density measurement
TOKYO ELECTRON LTD22 citations92
US6573731B1Jun 3, 2003
Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator
TOKYO ELECTRON LTD22 citations92
US6891124B2May 10, 2005
Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer
TOKYO ELECTRON LTD45 citations91
US6753498B2Jun 22, 2004
Automated electrode replacement apparatus for a plasma processing system
TOKYO ELECTRON LTD29 citations90
US6799532B2Oct 5, 2004
Stabilized oscillator circuit for plasma density measurement
TOKYO ELECTRON LTD11 citations73