Inventor
VENEKLASEN LEE H
US34 patents
⚠️ This page may combine multiple inventors who share the name “VENEKLASEN LEE H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ETEC SYSTEMS INC
13 patentsUS5847959ADec 8, 1998
Method and apparatus for run-time correction of proximity effects in pattern generation
ETEC SYSTEMS INC177 citations96
US6215128B1Apr 10, 2001
Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography
ETEC SYSTEMS INC34 citations93
US6300630B1Oct 9, 2001
Annular differential seal for electron beam apparatus using isolation valve and additional differential pumping
ETEC SYSTEMS INC28 citations92
US5729022AMar 17, 1998
Composite concentric-gap magnetic lens and deflector with conical pole pieces
ETEC SYSTEMS INC23 citations92
US5876902AMar 2, 1999
Raster shaped beam writing strategy system and method for pattern generation
ETEC SYSTEMS INC72 citations91
US6274290B1Aug 14, 2001
Raster scan gaussian beam writing strategy and method for pattern generation
ETEC SYSTEMS INC43 citations90
US6259106B1Jul 10, 2001
Apparatus and method for controlling a beam shape
ETEC SYSTEMS INC40 citations90
US6262429B1Jul 17, 2001
Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash field
ETEC SYSTEMS INC35 citations89
US6011269AJan 4, 2000
Shaped shadow projection for an electron beam column
ETEC SYSTEMS INC16 citations84
US5900667AMay 4, 1999
Operating a solid state particle detector within a magnetic deflection field so as to minimize eddy currents
ETEC SYSTEMS INC17 citations84
US6002135ADec 14, 1999
Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece
ETEC SYSTEMS INC12 citations73
US5838006ANov 17, 1998
Conical baffle for reducing charging drift in a particle beam system
ETEC SYSTEMS INC16 citations73
US6326635B1Dec 4, 2001
Minimization of electron fogging in electron beam lithography
ETEC SYSTEMS INC12 citations71
APPLIED MATERIALS INC
9 patentsUS6392333B1May 21, 2002
Electron gun having magnetic collimator
APPLIED MATERIALS INC44 citations92
US6465795B1Oct 15, 2002
Charge neutralization of electron beam systems
APPLIED MATERIALS INC40 citations90
US6455863B1Sep 24, 2002
Apparatus and method for forming a charged particle beam of arbitrary shape
APPLIED MATERIALS INC16 citations83
US6476401B1Nov 5, 2002
Moving photocathode with continuous regeneration for image conversion in electron beam lithography
APPLIED MATERIALS INC16 citations82
US6541770B1Apr 1, 2003
Charged particle system error diagnosis
APPLIED MATERIALS INC9 citations74
US6515282B1Feb 4, 2003
Testing of interconnection circuitry using two modulated charged particle beams
APPLIED MATERIALS INC10 citations72
US6924494B2Aug 2, 2005
Method of exposing a target to a charged particle beam
APPLIED MATERIALS INC3 citations62
US6768117B1Jul 27, 2004
Immersion lens with magnetic shield for charged particle beam system
APPLIED MATERIALS INC4 citations62
US6828570B2Dec 7, 2004
Technique for writing with a raster scanned beam
APPLIED MATERIALS INC2 citations52
PERKIN ELMER CORP
6 patentsUS4818838AApr 4, 1989
Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems
PERKIN ELMER CORP42 citations92
US4469948ASep 4, 1984
Composite concentric-gap magnetic lens
PERKIN ELMER CORP28 citations92
US4397611AAug 9, 1983
Particle beam instrumentation ion pump
PERKIN ELMER CORP16 citations72
US4956024ASep 11, 1990
Non-contacting method of cleaning surfaces with a planoar gas bearing
PERKIN ELMER CORP14 citations71
US4695773ASep 22, 1987
Field emission gun electrode geometry for improved focus stability
PERKIN ELMER CORP13 citations66
US4337422AJun 29, 1982
Field emission gun with noise compensation
PERKIN ELMER CORP2 citations63
SIEMENS AG
5 patentsUS4038543AJul 26, 1977
Scanning transmission electron microscope including an improved image detector
SIEMENS AG22 citations79
US4066905AJan 3, 1978
Particle beam apparatus with zones of different pressure
SIEMENS AG22 citations76
US4101778AJul 18, 1978
Rod-shaped specimen holder for an optical corpuscular-beam apparatus
SIEMENS AG7 citations72
US4097739AJun 27, 1978
Beam deflection and focusing system for a scanning corpuscular-beam microscope
SIEMENS AG6 citations61
US4044256AAug 23, 1977
Support stand for a corpuscular-beam microscope
SIEMENS AG3 citations58