Inventor
DEVORE WILLIAM J
US15 patents
⚠️ This page may combine multiple inventors who share the name “DEVORE WILLIAM J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6392333B1May 21, 2002
Electron gun having magnetic collimator
APPLIED MATERIALS INC44 citations92
US7372195B2May 13, 2008
Electron beam source having an extraction electrode provided with a magnetic disk element
APPLIED MATERIALS INC9 citations82
US6521896B1Feb 18, 2003
Blanker assembly employing dielectric material
APPLIED MATERIALS INC9 citations65
US7514682B2Apr 7, 2009
Electron anti-fogging baffle used as a detector
APPLIED MATERIALS INC2 citations62
US6924494B2Aug 2, 2005
Method of exposing a target to a charged particle beam
APPLIED MATERIALS INC3 citations62
US6768117B1Jul 27, 2004
Immersion lens with magnetic shield for charged particle beam system
APPLIED MATERIALS INC4 citations62
US7227155B2Jun 5, 2007
Electrostatic deflection system with impedance matching for high positioning accuracy
APPLIED MATERIALS INC3 citations60
US6828996B2Dec 7, 2004
Electron beam patterning with a heated electron source
APPLIED MATERIALS INC3 citations60
US7315029B2Jan 1, 2008
Electrostatic deflection system with low aberrations and vertical beam incidence
APPLIED MATERIALS INC0 citations51
ETEC SYSTEMS INC
3 patentsUS5729022AMar 17, 1998
Composite concentric-gap magnetic lens and deflector with conical pole pieces
ETEC SYSTEMS INC23 citations92
US6002135ADec 14, 1999
Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece
ETEC SYSTEMS INC12 citations73
US4987311AJan 22, 1991
Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine
ETEC SYSTEMS INC3 citations62