Inventor
LU JENNIFER QING
US6 patents
⚠️ This page may combine multiple inventors who share the name “LU JENNIFER QING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGILENT TECHNOLOGIES INC
3 patentsIBM
3 patentsUS6817086B2Nov 16, 2004
Photolithographic process for extreme resolution of track width definition of a read head
IBM31 citations91
US6922890B2Aug 2, 2005
Planarization process for thin film surfaces
IBM9 citations71
US7263763B2Sep 4, 2007
Planarization method for a structure having a first surface for etching and a second surface
IBM0 citations50