Inventor
YUNOGAMI TAKASHI
JP25 patents
⚠️ This page may combine multiple inventors who share the name “YUNOGAMI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
19 patentsUS5284544AFeb 8, 1994
Apparatus for and method of surface treatment for microelectronic devices
HITACHI LTD173 citations99
US6607988B2Aug 19, 2003
Manufacturing method of semiconductor integrated circuit device
HITACHI LTD53 citations96
US6537461B1Mar 25, 2003
Process for treating solid surface and substrate surface
HITACHI LTD60 citations96
US6451665B1Sep 17, 2002
Method of manufacturing a semiconductor integrated circuit
HITACHI LTD66 citations96
US6340632B1Jan 22, 2002
Method of manufacturing a semiconductor device
HITACHI LTD44 citations96
US6326218B1Dec 4, 2001
Semiconductor integrated circuit and its manufacturing method
HITACHI LTD46 citations96
US6057081AMay 2, 2000
Process for manufacturing semiconductor integrated circuit device
HITACHI LTD50 citations96
US6756262B1Jun 29, 2004
Semiconductor integrated circuit device having spaced-apart electrodes and the method thereof
HITACHI LTD46 citations92
US6555464B2Apr 29, 2003
Semiconductor device and method of manufacturing the same
HITACHI LTD25 citations92
US6506674B2Jan 14, 2003
Method of manufacturing a semiconductor integrated circuit device
HITACHI LTD37 citations92
US6497992B1Dec 24, 2002
Process for manufacturing semiconductor integrated circuit device
HITACHI LTD32 citations92
US6432835B1Aug 13, 2002
Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratio
HITACHI LTD25 citations92
US6426255B1Jul 30, 2002
Process for making a semiconductor integrated circuit device having a dynamic random access memory
HITACHI LTD23 citations92
US5314839AMay 24, 1994
Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev
HITACHI LTD37 citations90
US6613242B2Sep 2, 2003
Process for treating solid surface and substrate surface
HITACHI LTD12 citations82
US6458602B1Oct 1, 2002
Method for fabricating semiconductor integrated circuit device
HITACHI LTD14 citations82
US6528400B2Mar 4, 2003
Method of manufacturing a semiconductor device
HITACHI LTD8 citations74
US5241186AAug 31, 1993
Surface treatment method and apparatus therefor
HITACHI LTD6 citations74
US5115130AMay 19, 1992
Surface measuring method and apparatus
HITACHI LTD9 citations74
RENESAS TECH CORP
6 patentsUS6998325B2Feb 14, 2006
Method for manufacturing semiconductor device
RENESAS TECH CORP11 citations83
US6774020B2Aug 10, 2004
Semiconductor device and method of manufacturing the same
RENESAS TECH CORP4 citations74
US7419902B2Sep 2, 2008
Method of manufacture of semiconductor integrated circuit
RENESAS TECH CORP8 citations72
US7264677B2Sep 4, 2007
Process for treating solid surface and substrate surface
RENESAS TECH CORP3 citations62
US7737023B2Jun 15, 2010
Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit device
RENESAS TECH CORP5 citations61
US7025896B2Apr 11, 2006
Process for treating solid surface and substrate surface
RENESAS TECH CORP0 citations52