Inventor
TSUNEKAWA SUKEYOSHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “TSUNEKAWA SUKEYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
16 patentsUS6607988B2Aug 19, 2003
Manufacturing method of semiconductor integrated circuit device
HITACHI LTD53 citations96
US6537461B1Mar 25, 2003
Process for treating solid surface and substrate surface
HITACHI LTD60 citations96
US6451665B1Sep 17, 2002
Method of manufacturing a semiconductor integrated circuit
HITACHI LTD66 citations96
US6326218B1Dec 4, 2001
Semiconductor integrated circuit and its manufacturing method
HITACHI LTD46 citations96
US4599135AJul 8, 1986
Thin film deposition
HITACHI LTD82 citations96
US4717462AJan 5, 1988
Sputtering apparatus
HITACHI LTD102 citations95
US5503708AApr 2, 1996
Method of and apparatus for removing an organic film
HITACHI LTD91 citations93
US4792842ADec 20, 1988
Semiconductor device with wiring layer using bias sputtering
HITACHI LTD44 citations92
US5747387AMay 5, 1998
Removal method of organic matter and system for the same
HITACHI LTD34 citations90
US5478401ADec 26, 1995
Apparatus and method for surface treatment
HITACHI LTD47 citations90
US6613242B2Sep 2, 2003
Process for treating solid surface and substrate surface
HITACHI LTD12 citations82
US6821446B2Nov 23, 2004
Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing
HITACHI LTD5 citations73
US6664184B2Dec 16, 2003
Method for manufacturing semiconductor device having an etching treatment
HITACHI LTD3 citations62
US7645509B2Jan 12, 2010
Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing
HITACHI LTD0 citations52
US7419577B2Sep 2, 2008
Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing
HITACHI LTD0 citations52
US4394245AJul 19, 1983
Sputtering apparatus
HITACHI LTD1 citations52