Inventor
HARA HIROMICHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “HARA HIROMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS6493062B2Dec 10, 2002
Driving apparatus and exposure apparatus
CANON KK61 citations95
US6512571B2Jan 28, 2003
Anti-vibration system for exposure apparatus
CANON KK31 citations92
US5881987AMar 16, 1999
Vibration damping apparatus
CANON KK36 citations92
US6897939B2May 24, 2005
Exposure apparatus
CANON KK8 citations73
US6885431B2Apr 26, 2005
Exposure apparatus and method of manufacturing a semiconductor device using the same
CANON KK9 citations73
US7944546B2May 17, 2011
Exposure apparatus and device manufacturing method
CANON KK2 citations62
US7227617B2Jun 5, 2007
Exposure apparatus and device manufacturing method
CANON KK4 citations62
US6914663B2Jul 5, 2005
Exposure apparatus
CANON KK5 citations62
US6862077B2Mar 1, 2005
Anti-vibration system for exposure apparatus
CANON KK4 citations62
US10481509B2Nov 19, 2019
Vibration damping apparatus, lithography apparatus, and method of manufacturing article
CANON KK0 citations51
US7821617B2Oct 26, 2010
Exposure apparatus and device manufacturing method
CANON KK1 citations51
JSR CORP
4 patentsUS6623907B2Sep 23, 2003
Radiation-sensitive resin composition
JSR CORP35 citations91
US6899989B2May 31, 2005
Radiation-sensitive resin composition
JSR CORP8 citations73
US6048659AApr 11, 2000
Radiation-sensitive resin composition
JSR CORP6 citations73
US7060414B2Jun 13, 2006
Radiation-sensitive resin composition
JSR CORP4 citations62