Inventor
KUNDALGURKI SRIVATSA
DE9 patents
⚠️ This page may combine multiple inventors who share the name “KUNDALGURKI SRIVATSA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
8 patentsUS7018893B1Mar 28, 2006
Method for fabricating bottom electrodes of stacked capacitor memory cells
INFINEON TECHNOLOGIES AG16 citations81
US7259061B2Aug 21, 2007
Method for forming a capacitor for an integrated circuit and integrated circuit
INFINEON TECHNOLOGIES AG8 citations71
US7208095B2Apr 24, 2007
Method for fabricating bottom electrodes of stacked capacitor memory cells and method for cleaning and drying a semiconductor wafer
INFINEON TECHNOLOGIES AG4 citations60
US7005385B2Feb 28, 2006
Method for removing a resist mask with high selectivity to a carbon hard mask used for semiconductor structuring
INFINEON TECHNOLOGIES AG5 citations60
US7084029B2Aug 1, 2006
Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor
INFINEON TECHNOLOGIES AG3 citations57
US7579253B2Aug 25, 2009
Method for cleaning a semiconductor wafer
INFINEON TECHNOLOGIES AG0 citations49
US7319223B2Jan 15, 2008
Method and apparatus for characterizing a recess located on a surface of a substrate
INFINEON TECHNOLOGIES AG0 citations49
US7284558B2Oct 23, 2007
Enhanced megasonic based clean using an alternative cleaning chemistry
INFINEON TECHNOLOGIES AG1 citations49