Inventor

UHLENBROCK STEFAN

US61 patents

⚠️ This page may combine multiple inventors who share the name “UHLENBROCK STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UHLENBROCK STEFAN

MICRON TECHNOLOGY INC

Methods of forming silicon nitride by atomic layer deposition and methods of forming semiconductor structures

Systems and methods for forming strontium- and/or barium-containing layers

Systems and methods for forming strontium- and/or barium-containing layers

Complexes having tris(pyrazolyl)methanate ligands

Methods of making semiconductor devices

Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers

Methods for preparing ruthenium and osmium compounds

Methods and apparatus for forming rhodium-containing layers

Deposition methods using heteroleptic precursors

Chemical vapor deposition methods utilizing ionic liquids

Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same

Process for direct deposition of ALD RhO2

Devices containing platinum-rhodium layers and methods

Process for low temperature atomic layer deposition of Rh

Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide

Metal complexes with chelating C-, N-donor ligands for forming metal-containing films

Methods for preparing ruthenium and osmium compounds

Process for low temperature atomic layer deposition of RH

Method of forming ruthenium and ruthenium oxide films on a semiconductor structure

Solutions of metal-comprising materials

Solutions of metal-comprising materials, and methods of making solutions of metal-comprising materials

Methods for preparing ruthenium and osmium compounds

Solutions of metal-comprising materials, methods of forming metal-comprising layers, methods of storing metal-comprising materials, and methods of forming capacitors

Metal complexes with chelating C-, N-donor ligands for forming metal-containing films

Metal complexes with chelating C-,N-donor ligands for forming metal-containing films

Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same

Methods for forming niobium and/or vanadium containing layers using atomic layer deposition

Systems and methods for the electrolytic removal of metals from substrates

Methods and apparatus for forming rhodium-containing layers

Complexes having tris(pyrazolyl)borate ligands for forming films

Methods of forming a film on a substrate using complexes having tris(pyrazolyl) methanate ligands

Complexes having tris (pyrazolyl) borate ligands for forming films

Methods of forming semiconductor devices comprising silicon nitride on high aspect ratio features

Silicon chalcogenate precursors, methods of forming the silicon chalcogenate precursors, and related methods of forming silicon nitride and semiconductor structures

Methods for planarization of Group VIII metal-containing surfaces using oxidizing gases

Methods of forming silicon nitride including plasma exposure

Methods of forming a memory cell comprising a metal chalcogenide material

Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same

Systems and methods for forming niobium and/or vanadium containing layers using atomic layer deposition

Large scale synthesis of germanium selenide glass and germanium selenide glass compounds

Methods for preparing ruthenium and osmium compounds and films

Silicon chalcogenate precursors comprising a chemical formula of si(XR1)nR24-n and methods of forming the silicon chalcogenate precursors

Memory cells, semiconductor devices including the memory cells, and methods of operation

Memory cells including a metal chalcogenide material and related methods

Memory cells, semiconductor devices including the memory cells, and methods of operation

Memory cells and methods of fabrication

QUICK TIMOTHY A

Memory cells, semiconductor devices including such cells, and methods of fabrication

Methods of forming a metal chalcogenide material

UNIV TOLEDO

Electroless plating of a metal layer on an activated substrate

MARSH EUGENE P

Methods of forming a metal chalcogenide material and related methods of forming a memory cell