Inventor

AHN BYOUNG-SUP

KR5 patents

⚠️ This page may combine multiple inventors who share the name “AHN BYOUNG-SUP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US7927767B2Apr 19, 2011

Reflective photomasks and methods of determining layer thicknesses of the same

SAMSUNG ELECTRONICS CO LTD4 citations58

US10497534B2Dec 3, 2019

Aperture system of electron beam apparatus, electron beam exposure apparatus, and electron beam exposure apparatus system

SAMSUNG ELECTRONICS CO LTD0 citations51

US9892884B2Feb 13, 2018

Exposure apparatus and method of manufacturing semiconductor device

SAMSUNG ELECTRONICS CO LTD0 citations49

CHOI JIN

1 patent

US9671686B2Jun 6, 2017

Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom

CHOI JIN8 citations82

LEE YOUNG-MI

1 patent

US9116438B2Aug 25, 2015

Method of correcting flare and method of preparing extreme ultra violet mask

LEE YOUNG-MI8 citations77