Inventor
HUH SUNG-MIN
KR10 patents
⚠️ This page may combine multiple inventors who share the name “HUH SUNG-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
9 patentsUS7563547B2Jul 21, 2009
Photomask and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD17 citations82
US7642017B2Jan 5, 2010
Reflective photomask, method of fabricating the same, and reflective blank photomask
SAMSUNG ELECTRONICS CO LTD3 citations61
US7601467B2Oct 13, 2009
Method of manufacturing EUVL alternating phase-shift mask
SAMSUNG ELECTRONICS CO LTD2 citations61
US7745072B2Jun 29, 2010
Method of correcting critical dimension in photomask and photomask having corrected critical dimension using the method
SAMSUNG ELECTRONICS CO LTD4 citations60
US7389491B2Jun 17, 2008
Methods, systems and computer program products for correcting photomask using aerial images and boundary regions
SAMSUNG ELECTRONICS CO LTD5 citations60
US7927767B2Apr 19, 2011
Reflective photomasks and methods of determining layer thicknesses of the same
SAMSUNG ELECTRONICS CO LTD4 citations58
US7855034B2Dec 21, 2010
Reflecting mask, apparatus for fixing the reflecting mask and method of fixing the reflecting mask
SAMSUNG ELECTRONICS CO LTD1 citations51
US7754398B2Jul 13, 2010
Photo mask having assist pattern and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US7745068B2Jun 29, 2010
Binary photomask having a compensation layer
SAMSUNG ELECTRONICS CO LTD1 citations49