Inventor
COWANS KENNETH W
US51 patents
⚠️ This page may combine multiple inventors who share the name “COWANS KENNETH W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COWANS KENNETH W
9 patentsUS9360243B1Jun 7, 2016
Temperature control system and method TDSF plus
COWANS KENNETH W5 citations83
US8453468B1Jun 4, 2013
System and method for thermal control of different heat loads from a single source of saturated fluids
COWANS KENNETH W9 citations83
US4549146AOct 22, 1985
Systems and methods for compensating for element nonlinearities in electronic circuits
COWANS KENNETH W20 citations80
US4426552AJan 17, 1984
Speaker distortion compensator
COWANS KENNETH W24 citations80
US4622660ANov 11, 1986
Systems and methods for signal compensation
COWANS KENNETH W11 citations71
US8532832B2Sep 10, 2013
Method and apparatus for thermal exchange with two-phase media
COWANS KENNETH W4 citations62
US8240160B2Aug 14, 2012
Thermal control system and method
COWANS KENNETH W4 citations60
US9435255B2Sep 6, 2016
VCRC engine with insulated chambers
COWANS KENNETH W0 citations52
US9416723B2Aug 16, 2016
Air supply concepts to improve efficiency of VCRC engines
COWANS KENNETH W0 citations52
ADVANCED THERMAL SCIENCES CORP
7 patentsUS7661460B1Feb 16, 2010
Heat exchangers for fluid media
ADVANCED THERMAL SCIENCES CORP66 citations98
US7415835B2Aug 26, 2008
Thermal control system and method
ADVANCED THERMAL SCIENCES CORP119 citations98
US7178353B2Feb 20, 2007
Thermal control system and method
ADVANCED THERMAL SCIENCES CORP79 citations97
US7765820B2Aug 3, 2010
Thermal control system and method
ADVANCED THERMAL SCIENCES CORP29 citations92
US6775996B2Aug 17, 2004
Systems and methods for temperature control
ADVANCED THERMAL SCIENCES CORP51 citations92
US6769882B2Aug 3, 2004
Pressure compensation for localized bearing heating in pumps driven by motors with fluid filled rotors
ADVANCED THERMAL SCIENCES CORP2 citations63
US7243500B2Jul 17, 2007
Heat exchanger and temperature control unit
ADVANCED THERMAL SCIENCES CORP4 citations62
B E AEROSPACE
6 patentsUS6102113AAug 15, 2000
Temperature control of individual tools in a cluster tool system
B E AEROSPACE49 citations96
US6499535B2Dec 31, 2002
Temperature control of individual tools in a cluster tool system
B E AEROSPACE20 citations92
US6068455AMay 30, 2000
Long life pump system
B E AEROSPACE27 citations92
US6109047AAug 29, 2000
Systems and methods for capacity regulation of refrigeration systems
B E AEROSPACE23 citations91
US6209334B1Apr 3, 2001
Systems and methods for capacity regulation of refrigeration systems
B E AEROSPACE15 citations83
US6247531B1Jun 19, 2001
Temperature control of individual tools in a cluster tool system
B E AEROSPACE10 citations74
ADVANCED THERMAL SCIENCES
5 patentsUS7442275B2Oct 28, 2008
Lateral temperature equalizing system for large area surfaces during processing
ADVANCED THERMAL SCIENCES545 citations99
US7195693B2Mar 27, 2007
Lateral temperature equalizing system for large area surfaces during processing
ADVANCED THERMAL SCIENCES549 citations99
US7337625B1Mar 4, 2008
Thermal control systems for process tools requiring operation over wide temperature ranges
ADVANCED THERMAL SCIENCES12 citations84
US7152426B1Dec 26, 2006
Thermal control systems for process tools requiring operation over wide temperature ranges
ADVANCED THERMAL SCIENCES15 citations84
US6993918B1Feb 7, 2006
Thermal control systems for process tools requiring operation over wide temperature ranges
ADVANCED THERMAL SCIENCES15 citations84
BE AEROSPACE INC
5 patentsUS5802863ASep 8, 1998
System and method for refrigerating liquids
BE AEROSPACE INC39 citations93
US11154073B1Oct 26, 2021
Temperature control system and method TDSF plus
BE AEROSPACE INC0 citations62
US9372020B2Jun 21, 2016
Method and apparatus for thermal exchange with two-phase media
BE AEROSPACE INC2 citations62
US10386101B2Aug 20, 2019
Method and apparatus for thermal exchange with two-phase media
BE AEROSPACE INC0 citations51
US10342241B2Jul 9, 2019
Temperature control system and method TDSF plus
BE AEROSPACE INC0 citations51
BUCHBERGER JR DOUGLAS A
4 patentsUS8329586B2Dec 11, 2012
Method of processing a workpiece in a plasma reactor using feed forward thermal control
BUCHBERGER JR DOUGLAS A11 citations92
US8221580B2Jul 17, 2012
Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops
BUCHBERGER JR DOUGLAS A14 citations92
US8092639B2Jan 10, 2012
Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes
BUCHBERGER JR DOUGLAS A20 citations92
US8337660B2Dec 25, 2012
Capacitively coupled plasma reactor having very agile wafer temperature control
BUCHBERGER JR DOUGLAS A12 citations84
(unassigned)
3 patentsBRILLHART PAUL LUKAS
3 patentsUS8980044B2Mar 17, 2015
Plasma reactor with a multiple zone thermal control feed forward control apparatus
BRILLHART PAUL LUKAS10 citations92
US8546267B2Oct 1, 2013
Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control
BRILLHART PAUL LUKAS5 citations83
US8801893B2Aug 12, 2014
Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor
BRILLHART PAUL LUKAS5 citations72
APPLIED MATERIALS INC
2 patentsCOWANS WILLIAM W
2 patentsACUREX CORP
1 patentKINERGETICS INC
1 patentBENNETT SOUND CORP
1 patentKETOBI ASSOCIATES
1 patentShowing the top 50 of 51 patents by PatentIndex Score.