Inventor
ZUBILLAGA GLENN W
US15 patents
⚠️ This page may combine multiple inventors who share the name “ZUBILLAGA GLENN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED THERMAL SCIENCES CORP
4 patentsUS7415835B2Aug 26, 2008
Thermal control system and method
ADVANCED THERMAL SCIENCES CORP119 citations98
US7178353B2Feb 20, 2007
Thermal control system and method
ADVANCED THERMAL SCIENCES CORP79 citations97
US7765820B2Aug 3, 2010
Thermal control system and method
ADVANCED THERMAL SCIENCES CORP29 citations92
US7243500B2Jul 17, 2007
Heat exchanger and temperature control unit
ADVANCED THERMAL SCIENCES CORP4 citations62
BUCHBERGER JR DOUGLAS A
4 patentsUS8329586B2Dec 11, 2012
Method of processing a workpiece in a plasma reactor using feed forward thermal control
BUCHBERGER JR DOUGLAS A11 citations92
US8221580B2Jul 17, 2012
Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops
BUCHBERGER JR DOUGLAS A14 citations92
US8092639B2Jan 10, 2012
Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes
BUCHBERGER JR DOUGLAS A20 citations92
US8337660B2Dec 25, 2012
Capacitively coupled plasma reactor having very agile wafer temperature control
BUCHBERGER JR DOUGLAS A12 citations84
BRILLHART PAUL LUKAS
3 patentsUS8980044B2Mar 17, 2015
Plasma reactor with a multiple zone thermal control feed forward control apparatus
BRILLHART PAUL LUKAS10 citations92
US8546267B2Oct 1, 2013
Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control
BRILLHART PAUL LUKAS5 citations83
US8801893B2Aug 12, 2014
Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor
BRILLHART PAUL LUKAS5 citations72